http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2016088500-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d9cb217f83556ce2a418344c2d485415 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45553 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C8-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-448 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-448 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-318 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-42 |
| filingDate | 2015-11-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fcefe1bb4a1c71461d704d1691e43483 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_33e089881ea9874599e16fe6c4fd9656 |
| publicationDate | 2016-06-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | WO-2016088500-A1 |
| titleOfInvention | Method for producing metal carbonitride film or metalloid carbonitride film, metal carbonitride film or metalloid carbonitride film, and apparatus for producing metal carbonitride film or metalloid carbonitride film |
| abstract | Provided are a method and apparatus by which a metal carbonitride film or metalloid carbonitride film can be formed at a low temperature.nA metal carbonitride film or metalloid carbonitride film is formed by supplying a nitrogen source which contains a guanidine compound represented by general formula (1) (In the formula, the plurality of R groups may be the same as or different from each other and each denotes a hydrogen atom, a straight chain, branched chain or cyclic alkyl group having 1-5 carbon atoms, or a trialkylsilyl group having 1-9 carbon atoms. Moreover, the plurality of R groups may bond to each other to form a ring.), and a metal source or metalloid source to an object on which a film is to be formed. |
| priorityDate | 2014-12-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 151.