| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a3d52eacd83e723ebd2ca61b598586c2 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G05B2219-37571
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G05B2219-37365
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-221
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-2817 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G05B19-401
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-20 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate |
2015-10-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6b344889ffd2d5693390c8ad85d82ec6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c51fd78eda6561783a08dd4a3814ad05
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0f3192df9cd268f01de20f483c209146
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fb084b8130d54b43c7cd88e218b80dbf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_02b7f7b107e5773c96ed93cc2658c596
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3d046494aff2c6afc49a616e6390f5f5 |
| publicationDate |
2016-04-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2016061080-A1 |
| titleOfInvention |
Defect detection using structural information |
| abstract |
Systems and methods for detecting defects on a specimen based on structural information are provided. One system includes one or more computer subsystems configured for separating the output generated by a detector of an inspection subsystem in an array area on a specimen into at least first and second segments of the output based on characteristic(s) of structure(s) in the array area such that the output in different segments has been generated in different locations in the array area in which the structure(s) having different values of the characteristic(s) are formed. The computer subsystem(s) are also configured for detecting defects on the specimen by applying one or more defect detection methods to the output based on whether the output is in the first segment or the second segment. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019050376-A |
| priorityDate |
2014-10-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |