| abstract |
According to the present invention, provided is a poly-silicon manufacturing apparatus comprising: a horizontal reaction tube that has a source gas supply port for supplying a source gas that contains a reaction gas and a reduction gas, a residual gas exhaust port, a reaction surface with which the source gas makes contact, and an opening formed in the bottom thereof for discharging molten poly-silicon that is generated by a reaction of the source gas; and a first heating means for heating the reaction surface of the horizontal reaction tube, wherein the horizontal reaction tube includes one or more reaction regions, each of which has a first region for precipitating the poly-silicon and a second region for converting a reaction byproduct into the reaction gas, which are connected to each other in series. In addition, provided is a poly-silicon manufacturing method using the poly-silicon manufacturing apparatus. |