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publicationDate 2016-03-17-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-2016039415-A1
titleOfInvention Method for producing silicon carbide crystals and crystal production device
abstract Provided is a method whereby single crystals of silicon carbide can be grown on an off substrate formed of silicon carbide while preventing surface roughening.nA method for producing silicon carbide crystals, said method comprising rotating a silicon carbide seed crystal while contacting with a starting material solution containing silicon and carbon, characterized in that: a crystal growth plane of the seed crystal has an off angle; and the rotation center of the seed crystal is positioned in a downstream side, relative to the center position of the seed crystal, along the step flow direction corresponding to the off angle formation direction.
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