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filingDate 2015-08-26-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4c2fd9b95ff8a4e873fa16d15cd3c732
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publicationDate 2016-03-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-2016033148-A1
titleOfInvention Precursors for electron beam-induced deposition of gold and silver
abstract Precursors are prepared and employed in electron beam induced decomposition (EBID). The EBID precursors are complexes of the formula: X-M-Y, where M is Au or Ag; X is F, C1, Br, I, CN, OR 1 , O 2 CR 2 , or R 3 ; Y is P(OR) 3 , NR 3 , unsubstituted or substituted pyrrole, unsubstituted or substituted pyridine, unsubstituted or substituted pyrrolidine, or unsubstituted or substituted piperidine; and where R, R 1 , R 2 , R 3 , and substituents of the substituted pyrrole, pyridine, pyrrolidine, or piperidine are independently H, C 1 -C 8 alkyl, C6- C 10 aryl, C 1 -C 8 perfluoroalkyl, C 1 -C 8 partially fluorinated alkyl, and SiR 5 R 6 R 7 where R 5 , R 6 , and R 7 are independently H, C 1 -C 8 alkyl, or C 1 -C 8 fluorinated alkyl. The decomposition of the EBID precursor results in the formation of one or more gold, silver, or any combination thereof features on a substrate.
priorityDate 2014-08-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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