http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2016011172-A1

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4345033974dcd320c7c504d78f2dbef1
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-057
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B06B1-0622
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-88
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-875
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-85
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-87
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-073
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-2047
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B06B1-0629
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B06B1-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-09
filingDate 2015-07-15-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f029642d0e603de2a444998dbdaa08b3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0f353811972859f380bcbc6cdd877c12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_706efbed64b46ea1e4ef23659af92ce4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7544f5961c08e1217c84b597b3db91bb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8010626cc431c639764727e2a473b4a3
publicationDate 2016-01-21-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-2016011172-A1
titleOfInvention Piezoelectric micromachined ultrasonic transducers using two bonded substrates
abstract A piezoelectric micromachined ultrasound transducer (PMUT) is disclosed. The PMUT consists of a flexural membrane that is piezoelectrically actuated. These membranes are formed on a first substrate that is bonded to a second substrate. The two substrates are separated by an air gap to allow the PMUT to vibrate. Several methods for joining the two substrates are described.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10539539-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10755067-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10656255-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/FR-3077163-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109196671-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017192890-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10315222-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11440052-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11288891-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10325915-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11232549-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11626099-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10474862-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11392789-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11188735-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10706835-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020102564-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2020147644-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11460957-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11112388-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10936843-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11577276-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10441975-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10643052-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10445547-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10936841-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109622347-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11682228-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10452887-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11471912-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11328165-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11243300-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11673165-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11706989-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109196671-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11216632-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10632500-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10408797-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10860831-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10670716-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10562070-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10984209-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11154906-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11216681-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11176345-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10997388-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11651611-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10891461-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10600403-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11151355-B2
priorityDate 2014-07-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012146458-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010327695-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005205951-A1
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID159452
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID454456708
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24261
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559552
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559192
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6327157
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559503
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14806
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449325759
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5462224
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426098968
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID90455
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457707758
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16218254

Total number of triples: 92.