http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015180759-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f33567fe6314368960621c73140bbfc7 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02422 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02532 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02678 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-1872 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02689 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02683 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02691 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-18 |
| filingDate | 2014-05-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b3b284fa46f74a5ec8b193ba56ea63a5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8442691e5110ef76495af8979e1fbbe2 |
| publicationDate | 2015-12-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | WO-2015180759-A1 |
| titleOfInvention | Method for crystallizing a material, semiconductor module, and irradiation installation |
| abstract | The invention relates, among other things, to a method for crystallizing a material, wherein a first beam (12a) is produced by means of at least one radiation source, a second beam (12b) is produced by means of at least one further radiation source or by means of the at least one radiation source, and the first beam (12a) and the second beam (12b) are directed at a material to be crystallized in such a way that the first beam (12a) and the second beam (12b) overlap (U). The first beam (12a) is a beam having a linear (15a) intensity profile (I), and a line (15a) of greatest intensity (I) of the first beam (12a) forms an angle (W1) to a relative motion direction (16) between the first beam (12a) and the material to be crystallized, which angle lies in the range of 91 degrees to 165 degrees or in the range of 100 degrees to 135 degrees. |
| priorityDate | 2014-05-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 40.