| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b9d0431643a8821a088efdecd07080e8 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-0176
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-017
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-0171
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-013 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-0038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B3-0075
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B3-0024 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C22C49-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C22C26-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B3-00 |
| filingDate |
2015-05-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a4c82218c9631cdadf16155a0e504833
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d793213d79524e501d2ec4262a66f04a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_58bac04f0d9cacff7bf250a1ad64347e |
| publicationDate |
2015-11-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2015179421-A1 |
| titleOfInvention |
Low-stress doped ultrananocrystalline diamond |
| abstract |
Nanocrystalline diamond coatings exhibit stress in nano/micro-electro mechanical systems (MEMS). Doped nanocrystalline diamond coatings exhibit increased stress. A carbide forming metal coating reduces the in-plane stress. In addition, without any metal coating, simply growing UNCD or NCO with thickness in the range of 3-4 micron also reduces inplane stress significantly. Such coatings can be used in MEMS applications. |
| priorityDate |
2014-05-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |