| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0526b6d97829b31552040eda34fd94a5 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H2009-155
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N70-8828
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H2003-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N70-231 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-02228
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H3-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G11C13-0004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N70-882
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-133
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-131
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-85
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H3-0073
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N70-8828
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N70-231 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H3-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-15 |
| filingDate |
2015-04-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cc27e37709412d4ba0ecc58b62e4d3af
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_64e81b2def0cc8a111c8db111315ce01 |
| publicationDate |
2015-10-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2015161257-A1 |
| titleOfInvention |
Piezoelectric mems resonator with integrated phase change material switches |
| abstract |
A monolithic integration of phase change material (PCM) switches with a MEMS resonator is provided to implement switching and reconfiguration functionalities. MEMS resonator includes a piezoelectric material to control terminal connections to the electrodes. The PCM is operable between an ON state and an OFF state by application of heat, which causes the phase change material to change from an amorphous state to a crystalline state or from a crystalline state to an amorphous state, the amorphous state and the crystalline state each associated with one of the ON state and the OFF state. A method of fabricating the MEMS resonator with phase change material is provided. A reconfigurable filter system using the MEMS resonators is also provided. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10790332-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017111805-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9887685-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10090821-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9584092-B2 |
| priorityDate |
2014-04-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |