http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015144319-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2a9477fa547774350cb8ec4b9ca87477 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B7-0014 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B7-0035 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B5-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B3-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B3-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02057 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76898 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
| filingDate | 2015-01-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a8238b456c92824c19ed9da518372845 |
| publicationDate | 2015-10-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | WO-2015144319-A1 |
| titleOfInvention | Method for coating cavities of a semiconductor substrate |
| abstract | The invention relates to a method for temporarily coating cavities (2), with which a semiconductor substrate (1) is at least partially interspersed and which are intended for a permanent coating and/or component mounting, with a temporarily applied coating material (3) before processing steps for processing at least one surface (1o) of the semiconductor substrate (1). The invention further relates to a method for removing a temporary coating from cavities (2) of a semiconductor substrate (1), wherein the coating has been or is applied according to an aforementioned method and wherein thereafter, in particular immediately thereafter, a permanent coating and/or component mounting of the cavities (2) occurs. |
| priorityDate | 2014-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 28.