http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015144291-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a8ace3886ad985680695e66f92b53552 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-70191 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-7085 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J4-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-70566 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-70591 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01M11-0285 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01M11-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01J4-00 |
| filingDate | 2015-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4372f6670f0e2f6a24fba670fdf4f737 |
| publicationDate | 2015-10-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | WO-2015144291-A1 |
| titleOfInvention | Measuring device for determining a polarisation parameter |
| abstract | The invention relates to a measuring device (10) for determining a polarisation parameter of an optical system (50) comprising an illumination system (12) for providing optical radiation (14), a measurement mask (22) which is disposed between the illumination system and the optical system and measurement structures (24) which are disposed on a plurality of field points (26) of the measurement mask, a polarisation variation unit (28) which is disposed in a beam path of the optical radiation and is configured so as to vary a polarisation state of the optical radiation as a function of field points, such that at the same time one of the field points is irradiated with the optical radiation (14-1) in a first polarisation state and and a further field point is irradiated with the optical radiation (14-2) in a second polarisation state, and a detection module (32) which is configured so as to detect the optical radiation after interaction with the optical system. |
| priorityDate | 2014-03-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID246877017 |
Total number of triples: 19.