| abstract |
Provided are an array substrate and method for fabrication and display device thereof; arranged on the same layer are the source and drain (2) and data line, and the surfaces thereof have an oxide thin film (5) formed after annealing the source and drain (2) and data line, thus when a patterning process is used above the source and drain (2) and the data line to form the graphic of a pixel electrode (3), the oxide thin film (5) protects the underlying source and data line from being corroded by the etchant during etching of the pixel electrode (3) pattern, and the problem of the display quality of the display panel being affected is prevented; furthermore, a connecting part (4) electrically connects the drain (2) and the pixel electrode (3) by means of a first via (A) located above the drain (2) and running through the oxide thin film (5), ensuring normal display functionality of the display panel. |