http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015127467-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N22-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R27-26 |
| filingDate | 2015-02-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_17383252d686b2be1fa494da96d10718 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dd97ca957ec62a8f68b493c9c1eff69d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_23d091b7d153aed60d5820a5acc358a4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3d234124be7e513dda348c4f8808368e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6d16a886f41c9ca9bf2e99d686a524cc |
| publicationDate | 2015-08-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | WO-2015127467-A1 |
| titleOfInvention | Ceramic ring test device |
| abstract | A test device for testing an electrical property of a chamber component, such as a ceramic ring, includes an outer conductor and an inner conductor disposed within and electrically isolated from the outer conductor. The outer conductor has a base, a top, and an interior sidewall disposed between the base and the top. The inner conductor has a top portion having a first diameter and a bottom portion having a second diameter, in which the second diameter is greater than the first diameter. A sample area is defined between the base of the outer conductor and the bottom portion of the inner conductor, and is configured to receive a chamber component. The electrical property of the chamber component and wherein an electrical property of the chamber component is measurable based on application of a signal to at least one of the outer conductor or the inner conductor. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106597239-A |
| priorityDate | 2014-02-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 21.