Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_20909e43656210dc1bcb5b4f2b3ad43d |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B06B1-0629 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-42 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T156-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B06B1-0622 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B06B1-064 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B06B1-0629 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-079 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-077 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-092 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-871 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-082 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-074 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-852 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/A61B8-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H04R17-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-24 |
filingDate |
2014-12-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b55c60c7cb244b51c6199d6457c77bea http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7d8de18787792e3e7e42f06984351dbc http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eee6da01d6f1aefed0e63649997ef9a5 |
publicationDate |
2015-06-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
WO-2015088184-A1 |
titleOfInvention |
Method of manufacturing ultrasonic probe |
abstract |
Provided is a method of manufacturing an ultrasonic probe. The method includes forming a sacrificial layer on a substrate; forming a plurality of openings in the sacrificial layer that are separated from one another; forming piezoelectric units by growing a piezoelectric element in each of the plurality of openings; and removing the sacrificial layer. |
priorityDate |
2013-12-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |