http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015088184-A1

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filingDate 2014-12-04-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b55c60c7cb244b51c6199d6457c77bea
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publicationDate 2015-06-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-2015088184-A1
titleOfInvention Method of manufacturing ultrasonic probe
abstract Provided is a method of manufacturing an ultrasonic probe. The method includes forming a sacrificial layer on a substrate; forming a plurality of openings in the sacrificial layer that are separated from one another; forming piezoelectric units by growing a piezoelectric element in each of the plurality of openings; and removing the sacrificial layer.
priorityDate 2013-12-09-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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