Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_761badd273d705eea3da7c549ddfe8d8 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_37f4922dfb7777b019e504b885211b8e |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P70-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02E10-543 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1204 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1216 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C2-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-1828 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C18-12 |
filingDate |
2014-12-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2015096b43faee27994573210f6799c0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0e99e052fb2f96c9e00f15829dd49cac http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_095ebd5e355f386c36ce60c0d9362e95 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_077a527fa3f744bf11c10062492c19ea |
publicationDate |
2015-06-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
WO-2015086987-A1 |
titleOfInvention |
Persulfate bath and method for chemically depositing a layer |
abstract |
The invention relates to a chemical bath for depositing a layer made from at least metal and sulphur. It also relates to a method for depositing such a layer. The bath comprises, in solution: - a metal salt comprising a metal chosen from at least one of the elements from groups IIB and IIIA of the periodic table; and - a sulphur precursor. The bath further comprises a persulfate compound. |
priorityDate |
2013-12-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |