http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015082997-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5e5e4671b3ba1fd59502c47747a80896 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05G2-005 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2008 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05G2-006 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05G2-008 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05G2-005 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05G2-00 |
| filingDate | 2014-11-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ae67051e51e319d158563ed67bda222c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4cabc02d80f8d98f83df50ae5a60c2ae http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f1564bcadfe7d9d1a11cb5fd4b07786a |
| publicationDate | 2015-06-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | WO-2015082997-A1 |
| titleOfInvention | Apparatus for and method of source material delivery in a laser produced plasma euv light source |
| abstract | A device and method are disclosed in which gas is caused to flow parallel to a flow of source material to form a gas shroud. The gas shroud may protect flow of source material from being disrupted by a cross flow of gas. The gas shroud may also limit heating of a physical shroud through which the source material passes and limit accumulation of source material on the physical shroud by deforming a plasma bubble formed during irradiation of the source, material so that the plasma bubble does not come too near the physical shroud. A device and method, are also disclosed for establishing m additional transverse flow of gas so that the gas shroud does not cause source material contamination of an optic used to collect light generated during irradiation of the source material. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10268119-B2 |
| priorityDate | 2013-12-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 39.