| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24298
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24314 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-467
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6875
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6831 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H02N13-00 |
| filingDate |
2014-11-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f6e4bc6955bbae614d98887087c8419d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2f4276c13000ffdf1c86e351cb177e99
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_893056ac999c9d766f6982df8554c144
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5734111ee959c1e3c7e5602fd4c15ea3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_855bc6c2798b52adac4beb0a2cfcc34a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2628516893c8e32077fd5d6a502644c7 |
| publicationDate |
2015-05-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2015077590-A1 |
| titleOfInvention |
Pad design for electrostatic chuck surface |
| abstract |
Embodiments are directed to an electrostatic chuck surface having minimum contact area features. More particularly, embodiments of the present invention provide an electrostatic chuck assembly having a pattern of raised, elongated surface features for providing reduced particle generation and reduced wear of substrates and chucking devices. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10832936-B2 |
| priorityDate |
2013-11-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |