http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015056405-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d78fe473c8a29219129bbc8bb50f6a59 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B53-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24D3-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30625 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B53-017 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02024 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-463 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B53-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24D3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24D7-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B53-12 |
| filingDate | 2014-09-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6f9c8844600199370b37b2cfc4c33f26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e8388a486be8252e31329411ec02c6ba http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f5547428331814a30da3aaf86bff478e |
| publicationDate | 2015-04-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | WO-2015056405-A1 |
| titleOfInvention | Dressing device for polishing-use foamed urethane pad |
| abstract | The present invention provides a dressing device for dressing a polishing-use foamed urethane pad by pressing diamond abrasive grains against the polishing-use foamed urethane pad and causing sliding contact therebetween, wherein the dressing device is characterized by the following: the diamond abrasive grains are held by a base; the diamond abrasive grains held by the base have multiple grit sizes; the diamond abrasive grains having multiple grit sizes comprise high count diamond abrasive grains having a grit size of at least #170 and low count diamond abrasive grains having a grit size of no more than #140; the diamond abrasive grains are held by a base so that the height position of the dressing surfaces, of the multiple count diamond abrasive grains, which come into contact with the foamed urethane pad, are on the same plane. Due to this configuration, provided is a dressing device with which, by sufficiently roughening the surface with one roughening treatment without closing the foam holes of the foamed urethane pad, dressing time can be shortened, dressing intervals can be lengthened, and drops in productivity can be suppressed. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104875131-A |
| priorityDate | 2013-10-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 206.