| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2a819eda0adf22936a52362eeebb9fb4 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B3-0045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-0015 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N15-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J5-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-14649
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-14683
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J5-0853 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01J5-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-146
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L37-02 |
| filingDate |
2014-07-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7be8bfb219f61f2bb20fc6d3852428fe
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cd16a23a4509149b9db8f5e6aebbbc9b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_662963b1863dbcfe4738089d316e70c1 |
| publicationDate |
2015-02-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2015017703-A2 |
| titleOfInvention |
Pyroelectric aluminum nitride mems infrared sensor with selective wavelength infrared absorber |
| abstract |
A MEMS sensor for detecting electromagnetic waves in a particular frequency range is provided. In a preferred embodiment, the MEMS sensor comprises a bottom substrate layer; a first electrode layer over the substrate layer; a pyroelectric layer over the first electrode layer; and a second electrode layer over the pyroelectric layer; wherein a top electrode layer is patterned with a periodic structure that has a periodicity less than or equal to target infrared wavelength. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105552206-A |
| priorityDate |
2013-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |