http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2014197346-A1

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1a34d7d2e0d09a58cb7bf4a04c81162e
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01G23-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3081
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D1-00
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01G23-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J13-00
filingDate 2014-06-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c375c3939146ac6b9569bb745604241c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_141e32aa8302cc2177be6cf688c0310e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_710ed0e19b18f8761d13b5fb0ca683df
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aa2db480cfaea3b1cba6feb4b00dc379
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d0c19bda5f4c9cfab73514d9e05948fd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0795d86febbce98e94eefccb8a150b67
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ad732d3313f95bf1ea3a9555b53e714c
publicationDate 2014-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-2014197346-A1
titleOfInvention Liquid titanium oxide compositions, methods for forming the same, and methods for etching material layers of or overlying substrates using the same
abstract Liquid titanium oxide compositions, methods for forming such compositions, and methods for etching material layers using such compositions are provided. In accordance with an exemplary embodiment, a liquid titanium oxide composition contains a solvent system, an organotitanate, and a high boiling point solvent having a boiling point in the range of about 140°C to about 400°C.
priorityDate 2013-06-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100983544-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7067346-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005277274-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20080037721-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007092734-A1
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226396020
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID76595
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8177
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID175
http://rdf.ncbi.nlm.nih.gov/pubchem/gene/GID5972
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID69949
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5012309
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410493711
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129267473
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419548882
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420501384
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419596525
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226421189
http://rdf.ncbi.nlm.nih.gov/pubchem/gene/GID19701
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID30111
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3593277
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID110612
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7910
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11671
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393345
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226432263
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7761
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419483804
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID87058081
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226406104
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127835298
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID61868
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226396035
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7715
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID702
http://rdf.ncbi.nlm.nih.gov/pubchem/gene/GID469651
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414031889
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21225595
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129488282
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425953283
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127398360
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226406021
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419508978
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420268254
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414813173
http://rdf.ncbi.nlm.nih.gov/pubchem/protein/ACCQ6DLS0
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419474387
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID76524
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24197
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559541
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID31288
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID19042707
http://rdf.ncbi.nlm.nih.gov/pubchem/protein/ACCF6W228
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID974
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226406402
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5461123
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID31261
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226406401
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID161213
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456986878
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID4379755
http://rdf.ncbi.nlm.nih.gov/pubchem/protein/ACCP52115
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226471072
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID57443601
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID25054
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128562115
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID406903349
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226438665
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129310330
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226401799
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129297738
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226393971
http://rdf.ncbi.nlm.nih.gov/pubchem/gene/GID44122
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419544893
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420501360
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226393970
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226417526
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457707770
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID31404
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11748
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21903800
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410555282
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512635
http://rdf.ncbi.nlm.nih.gov/pubchem/gene/GID19702
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22179231
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23963
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419527601
http://rdf.ncbi.nlm.nih.gov/pubchem/gene/GID403838
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420454520
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414780872
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24752
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8146
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7946
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419538260
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID407843040
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9554
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226493637
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226440720
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419578768
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21801
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID379
http://rdf.ncbi.nlm.nih.gov/pubchem/gene/GID100399036
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8114
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID26042
http://rdf.ncbi.nlm.nih.gov/pubchem/protein/ACCQ6DYE7
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226411718
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8892
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226412797
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419554224
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID121752
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393640
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8134
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426125495
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128291334
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419538410
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22495263
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15286
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8199
http://rdf.ncbi.nlm.nih.gov/pubchem/gene/GID24715
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22495260
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID422135252
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226405929
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12530
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419593465
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7344
http://rdf.ncbi.nlm.nih.gov/pubchem/gene/GID216858
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226827788
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419518430
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419588590
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420539988
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419520672
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559477
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6049
http://rdf.ncbi.nlm.nih.gov/pubchem/protein/ACCQ9TSZ1
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458427391
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID962
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226399786
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8133
http://rdf.ncbi.nlm.nih.gov/pubchem/gene/GID450104
http://rdf.ncbi.nlm.nih.gov/pubchem/gene/GID280909
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226405986
http://rdf.ncbi.nlm.nih.gov/pubchem/protein/ACCP60016
http://rdf.ncbi.nlm.nih.gov/pubchem/gene/GID102122446
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226405985
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID61685
http://rdf.ncbi.nlm.nih.gov/pubchem/gene/GID405786
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID454228257
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21226484
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128240458
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226416826
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226405980
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3044557
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226406584
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID637517
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129642249
http://rdf.ncbi.nlm.nih.gov/pubchem/protein/ACCA0A6I8ST60
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226395968
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128945327
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID19846
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID445639
http://rdf.ncbi.nlm.nih.gov/pubchem/gene/GID574299
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID971
http://rdf.ncbi.nlm.nih.gov/pubchem/gene/GID147040
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID162651
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226411573
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226412502
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419544127
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127687641
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226438508
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226405778
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21226491
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226406103
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226405777
http://rdf.ncbi.nlm.nih.gov/pubchem/protein/ACCP00797
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129260972
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226471112
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512377
http://rdf.ncbi.nlm.nih.gov/pubchem/protein/ACCQ6DLW5
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425073573
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID53249235
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415712772
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419546719
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414862514
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450013893
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8178
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6951563
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226438457

Total number of triples: 209.