| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_646018b7183a929bbb6e26dcdb62a8da |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02565
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02554
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02631 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7869
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-086
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-3414 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-363
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34 |
| filingDate |
2014-04-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0abaaad778375be064f899c7953515ed
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2caa8e96085f50b272a902eb8841b439 |
| publicationDate |
2014-10-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2014168224-A1 |
| titleOfInvention |
Oxide semiconductor target, oxide semiconductor film and method for producing same, and thin film transistor |
| abstract |
The present invention provides an oxide semiconductor target which comprises a sintered oxide containing zinc, tin and oxygen and also containing aluminum at a content of 0.005 to 0.2 mass% relative to the whole mass of the sintered oxide, wherein the content of silicon relative to the whole mass of the sintered oxide is less than 0.03 mass%. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016216804-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017145185-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017160103-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108349816-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017086016-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108349816-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017149882-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017160105-A |
| priorityDate |
2013-04-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |