http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2014149780-A1

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publicationDate 2014-09-25-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-2014149780-A1
titleOfInvention Chemical sensor with consistent sensor surface areas
abstract In one embodiment, a chemical sensor is described. The chemical sensor includes a chemically-sensitive field effect transistor including a floating gate conductor having an upper surface. A material defines an opening extending to the upper surface of the floating gate conductor, the material comprising a first dielectric underlying a second dielectric. A conductive element contacts the upper surface of the floating gate conductor and extending a distance along a sidewall of the opening.
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