http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2014120541-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d3082cd39bb800686b9abbb8aa05c80b |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31058 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 |
| filingDate | 2014-01-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b9a05f507df5e833e72d83725bfa8cc2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0e6ff7cd8b4f833331f09711671f6655 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_73b8278b5fbff479cd8f920937e8d4e3 |
| publicationDate | 2014-08-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | WO-2014120541-A1 |
| titleOfInvention | Chemical-mechanical polishing composition containing zirconia and metal oxidizer |
| abstract | The invention provides a chemical-mechanical polishing composition and a method of chemically-mechanically polishing a substrate with the chemical-mechanical polishing composition. The polishing composition comprises (a) abrasive particles, wherein the abrasive particles comprise zirconia, (b) at least one metal ion oxidizer, wherein the at least one metal ion oxidizer comprises metal ions of Co 3+ , Au + , Ag + , Pt 2+ , Hg 2+ , Cr 3+ , Fe 3+ , Ce 4+ , or Cu 2+ , and (c) an aqueous carrier, wherein the pH of the chemical-mechanical polishing composition is in the range of 1 to 7, and wherein the chemical-mechanical polishing composition does not contain a peroxy-type oxidizer. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3049216-A4 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017061612-A |
| priorityDate | 2013-01-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 109.