abstract |
This infrared detection element is obtained by forming a first pyroelectric element and a second pyroelectric element side by side on one pyroelectric substrate. The first pyroelectric element is provided with a first front surface electrode, a first back surface electrode, and a first portion that is a portion of the pyroelectric substrate sandwiched between the first front surface electrode and the first back surface electrode. The second pyroelectric element is provided with a second front surface electrode, a second back surface electrode, and a second portion that is a portion of the pyroelectric substrate sandwiched between the second front surface electrode and the second back surface electrode. The pyroelectric substrate is provided with a slit, which follows the outer periphery of the first pyroelectric element, in a region that surrounds the first pyroelectric element so that the slit avoids a first front surface wiring line and a first back surface wiring line. A region of the pyroelectric substrate surrounding the second pyroelectric element is continuous all around the second portion. This infrared detector is provided with an infrared detection element. This infrared type gas sensor is provided with an infrared radiation element and an infrared detection element. |