http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2014103494-A1
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a665d61597c2731ab4130971ee397dc9 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1436 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-044 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 |
filingDate | 2013-10-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9c7df139bb8b8a4400ab8cda5a63fb4a |
publicationDate | 2014-07-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | WO-2014103494-A1 |
titleOfInvention | Polishing composition |
abstract | Provided is a polishing composition which can minimize the surface scratching of a metal substrate, namely an object to be polished, while suppressing the dishing of the metal substrate. The present invention is a polishing composition that comprises functional abrasive grains and water, said functional abrasive grains comprising: surface modifying groups, each of which has, at one terminal, a functional group that can be adsorbed to a metal substrate and thereby inhibit the dissolution of the metal substrate; and metal oxide particles on which the surface modifying groups are immobilized. |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3365403-A4 |
priorityDate | 2012-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 470.