| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e00afb080c75ff7243b1170715d280d1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_817cdee219ee094a8402a8e63e072164 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1436
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B28D5-0076
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D37-03
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C10M175-0058
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C10M175-0016 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C10M175-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D21-01 |
| filingDate |
2013-11-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c2c1a63aa076f0ed8aea2c507af70ad1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f616da5a6e1bcba0eb886aff3ea2c6c6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3ba7aec0baa98c14082fd71ca9c4d748
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7704342270d9d0cde702865b609358d2 |
| publicationDate |
2014-05-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2014081946-A2 |
| titleOfInvention |
Methods for the recycling of wire-saw cutting fluid |
| abstract |
A process is provided for treating coolant fluid used in wire-saw cutting of semiconductor wafers and which contains silicon-containing impurities. The process comprises changing the properties of the used coolant fluid so that the silicon-containing impurities may be filtered and separated from the coolant fluid to thereby yield a coolant fluid filtrate suitable for use in a wire-saw cutting operation. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108083510-A |
| priorityDate |
2012-11-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |