| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_167f44244429f5b590df6089dc54e144 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D2350-63 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45538
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-515
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45523
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D5-083
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/D06M23-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D4-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-62
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-405
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/D06M10-025
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0228
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/D06M14-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02274
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-509
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/D06M10-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02118
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02178
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-022 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D163-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D4-02 |
| filingDate |
2013-11-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e3679de64bde7611d0e756cbf9c98e32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2768a17a3e47a83e716105caee6bf400
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8e1e132b1ef00a43069c54e5ea72b1bc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_35e364f164cd6d0f589487508c33462b |
| publicationDate |
2014-05-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2014078497-A1 |
| titleOfInvention |
Apparatus and methods for plasma enhanced chemical vapor deposition of dielectric/polymer coatings |
| abstract |
Apparatuses and methods are described that involve the deposition of coatings on substrates. The polymer coatings generally comprise a wear resistant layer and/or a hydrophobic layer. The wear resistant layer can comprise a metal oxide or metal nitride. The hydrophobic layer can comprise fused polymer particles having an average primary particle diameter on the nanometer to micrometer scale. The coatings are deposited on substrates using specifically adapted plasma enhanced atomic layer deposition and plasma enhanced chemical vapor deposition approaches. The substrates can include computing devices and fabrics. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/GB-2601447-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3674438-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I593651-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105522789-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9328409-B2 |
| priorityDate |
2012-11-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |