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filingDate 2013-10-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2014-05-08-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-2014070534-A2
titleOfInvention Integrated bondline spacers for wafer level packaged circuit devices
abstract A method of forming a wafer level packaged circuit device includes forming a device wafer, the device wafer including a first group of one or more material layers left remaining in a first region of a substrate of the device wafer; and forming a cap wafer configured to be attached to the device wafer, the cap wafer including a second group of one or more material layers left remaining in a second region of a substrate of the cap wafer; wherein a combined thickness of the first and second groups of one or more material layers defines an integrated bond gap control structure upon bonding of the device wafer and the cap wafer.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019208072-A
priorityDate 2012-11-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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