| abstract |
[Problem] To provide a dense silicic film and a method for forming the film.n[Solution] A method for forming a dense silicic film which comprisesnapplying, on a substrate, a composition for coating film formation which contains a polymer having silazane bonds, thereby forming a film,nirradiating the film with light having a maximum peak wavelength of 160-179 nm, andnsuccessively irradiating the film with light having a maximum wavelength longer by 10-70 nm than the maximum peak wavelength of the light with which the film has been irradiated;nand a dense silicic film formed by the method. |