| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5825e613b0fdbdad94ab88fcfae650e1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_df3bb6cf1d33d5dfa3c7939ef6d7ad82
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1543b2b19ec0e331a0dcd89888cbef5f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1f42f9ade1df73a2804a6ca91442ebd1 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-245
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24D3-344
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1436
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31053 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24D3-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09C1-68 |
| filingDate |
2013-09-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a4057628eb35e7f01728c0930cf0157f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_92d378244ea8153ea1e691be8115fc42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_09348047173cbfb4544fc605952cc8f7 |
| publicationDate |
2014-03-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2014047014-A1 |
| titleOfInvention |
Incorporating additives into fixed abrasive webs for improved cmp performance |
| abstract |
A structured abrasive article is provided that has a backing having first and second opposed major surfaces and a structured abrasive layer disposed on and secured to the first major surface of the backing. The structured abrasive layer includes a polymeric binder, abrasive particles dispersed in the binder and an additive dispersed in the binder. The additive provides improved chemical mechanical planarization (CMP) polish performance, including high oxide/nitride selectively, high removal rates, lower nitride loss and improved with-in- wafer non-uniformity (WIWNU). |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019011251-A1 |
| priorityDate |
2012-09-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |