| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a665d61597c2731ab4130971ee397dc9 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F3-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1436
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30625
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-16 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate |
2013-08-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bfad1fdfef6126bcbec463e5b8ae370c |
| publicationDate |
2014-03-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2014038391-A1 |
| titleOfInvention |
Polishing composition |
| abstract |
[Problem] To provide a means for further improving polishing speed, in a polishing composition used in applications in which an object to be polished that includes a metal element or a semi-metal element is polished. [Solution] Water and an oxo acid including a metal element or a semi-metal element are included in a polishing composition used in applications in which an object to be polished that includes a metal element or a semi-metal element is polished. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016200943-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11168239-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018215952-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10647900-B2 |
| priorityDate |
2012-09-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |