| abstract |
Microporous membranes formed in a microfluidic device, and methods of manufacture. A method comprises the steps of etching a plurality of pillars in a microfluidic chamber, applying a first polymer material layer, applying a photoresist layer, exposing the photoresist layer to radiation to cross-link it to the microfluidic chamber, masking the photoresist layer with a porous mask, exposing the top layer of the masked photoresist layer to radiation to form a porous membrane layer of cross-linked photoresist material, removing the non-exposed photoresist material from under the porous membrane layer, drying the porous membrane layer, and removing the first polymer material from under the porous membrane layer. |