| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a6638ac6b1020cd2c62d09d748bc1ab9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ee1c19da359446fb5c4f0458a57b783d |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K50-82
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3208
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-664 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01B1-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-082
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-62645
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-35
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-3414 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B33-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B33-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-08 |
| filingDate |
2013-06-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4c4458b100970ad13906990df07ddb90
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7781e9de73848205b3b3501037b057a8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_78c301b9bc75d716259754de9c732629
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1d385dc2d431a2e958f2650c2f3be915
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f2b000dd3bf60f6a431a3f80c08ae70d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7e5fef57de775f249ee9cf35c48c8d79
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0f6932b6a0744f28da82b4f105648dd7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a52dec993dbbf8dff2f6ca845dfb0fba |
| publicationDate |
2013-12-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2013191210-A1 |
| titleOfInvention |
Production method for c12a7 electride thin film, and c12a7 electride thin film |
| abstract |
Provided is a production method for a C12A7 electride thin film, said production method being characterized in that a target of crystalline C12A7 electride having an electron density of 2.0×10 18 cm -3 to 2.3×10 21 cm - 3 is used under an atmosphere of low oxygen partial pressure when carrying out film formation on a substrate by means of a vapor deposition method in order to form an amorphous C12A7 electride thin film. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2014192701-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018021282-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015176965-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190032416-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015029038-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/ES-2923973-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11267720-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015124401-A |
| priorityDate |
2012-06-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |