| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_23a4e0c875bf1ac2b8a3b76517de6c7d |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-033
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01P2015-0871
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-0235 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B3-0051
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q40-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01P21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q20-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C99-003
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C99-0045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01P15-125
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01K11-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01C19-5755
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01P15-097 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01C19-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01P15-00 |
| filingDate |
2013-05-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_68f3f575517e88ad828f55478b2fca19 |
| publicationDate |
2013-12-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2013188131-A1 |
| titleOfInvention |
Microelectromechanical system and methods of use |
| abstract |
Methods of measuring displacement of a movable mass in a microelectro- mechanical system (MEMS) include driving the mass against two displacement-stopping surfaces and measuring corresponding differential capacitances of sensing capacitors such as combs. A MEMS device having displacement-stopping surfaces is described. Such a MEMS device can be used in a method of measuring properties of an atomic force microscope (AFM) having a cantilever and a deflection sensor, or in a temperature sensor having a displacement-sensing unit for sensing a movable mass permitted to vibrate along a displacement axis. A motion-measuring device can include pairs of accelerometers and gyroscopes driven 90° out of phase. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103884585-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9969606-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9903718-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103884585-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016349056-A1 |
| priorityDate |
2012-06-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |