| abstract |
The invention relates to a novel positive working photosensitive composition having: at least one photoacid generator; at least one novolak polymer; at least one polymer, having a polymer backbone, said polymer comprising a structure of the following formula: wherein R 1 - R 5 are, independently, -H or -CH 3 , A is a linear or branched C 1 -C 10 alkylene group, B is a C 1 -C 12 alkyl or alicyclic group, D is a linking group that may be a chemical bond, a carboxylate group, wherein the carbonyl carbon is bonded to the polymer backbone, or a -COOCH 2 - group, wherein the carbonyl carbon is bonded to the polymer backbone, Ar is a substituted or unsubstituted aromatic group or heteroaromatic group, E is a linear or branched C 2 -C 10 alkylene group, G is an acid cleavable group. The invention further relates to a process for using the novel composition for forming an image. |