Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_99505f5f312672820e9f78c254c00a4d |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01G13-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-225 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-22 |
filingDate |
2013-05-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7bd7a0957dd1dd690ea51061b7a1162e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d0ee1efbad4bbc820df47d2e325212ed http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4d4c250791e6b723fd153c9ae9ba5f26 |
publicationDate |
2013-11-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
WO-2013171144-A1 |
titleOfInvention |
Method for producing a capacitive sensor |
abstract |
A method for producing a capacitive sensor, comprising steps consisting of: (a) forming trenches (105) in a support (100) made from at least one given material by etching said at least one given material, (b) making said given material porous at the walls and the bottom of the trenches, (c) filling the trenches (105) with a conductive material (110). |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103983671-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10983093-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018020130-A1 |
priorityDate |
2012-05-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |