| abstract |
A double-sided coated surface stress sensor is characterized in that a sensing thin film structure part at least two opposite ends of which are affixed to a mounting part, a receptor layer with which both surfaces of the sensing thin film structure part are coated, and an element for detecting stress in the vicinity of at least one of the affixed two opposite ends of the sensing thin film structure part or at least one of the affixed two opposite ends of the mounting part are provided, and a detection output is obtained from the element on the basis of stress applied to the receptor layer with which both the surfaces of the sensing thin film structure part are coated. Consequently, the double-sided coated surface stress sensor in which both surfaces of the sensing thin film structure part are coated with the receptor layer, and a sufficiently large detection output can be obtained can be provided. |