| abstract |
A device and method for detecting the optical performance of a beam-shaping element of an ultraviolet lithography machine. The device comprises a visible laser, wherein a beam expander group, a beam splitter, a first far-field imaging lens, an adjustable aperture or a CCD image sensor, a second far-field imaging lens and a second energy sensor are coaxially arranged in sequence in the direction of the laser emitted from the visible laser. The present invention is applicable for detecting the optical performance of a beam-shaping element in any ultraviolet wave band, and has the characteristics of low costs, easy operation, and quick measurement. |