http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2013136881-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_44ff3005508304394801e265e503b811 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-38 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-84 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-58 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-22 |
| filingDate | 2013-02-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eeda4795866df3d6f508285fa12b8c17 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e964adfd8c8214215d27348b7a4030a3 |
| publicationDate | 2013-09-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | WO-2013136881-A1 |
| titleOfInvention | Mask blank, and method for producing mask for transcription use |
| abstract | A mask blank having such a structure that a thin film is formed on a substrate, said mask blank being characterized in that the thin film comprises a material containing at least one element selected from tantalum, tungsten, zirconium, hafnium, vanadium, niobium, nickel, titanium, palladium, molybdenum and silicon, and the standardized secondary ion intensity of at least one ion selected from a calcium ion, a magnesium ion and an aluminum ion is 1.0×10 -3 or less when the surface of the thin film is measured by time-of-flight secondary ion mass spectrometry (TOF-SIMS) under such measurement conditions that the primary ion species is Bi 3 n ++ , the primary acceleration voltage is 30 kV and the primary ion current is 3.0 nA. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018114690-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10410855-B2 |
| priorityDate | 2012-03-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 65.