http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2013122258-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1af8df51ce24ca931ae718fb747f6aa0 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F16F15-02 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G05D19-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F16F15-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F16F15-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F16F15-03 |
| filingDate | 2013-02-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_43d8719bb220241d45130e8d3ee90b5f |
| publicationDate | 2013-08-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | WO-2013122258-A1 |
| titleOfInvention | Active vibration isolator |
| abstract | A vibration isolator, including: a vibration isolated table, on which an object is mounted; elastic support members for supporting the vibration isolated table; position measurement units for measuring a shift of the vibration isolated table; driving units for driving the vibration isolated table; a target position command part for outputting target shifts and target rotation amounts; a shift computation part for computing and outputting shifts and rotation amounts; a position control part for computing and outputting translation forces and torques corresponding to the differences; a decoupling control part for performing computations for cancelling a motion accompanied by interference occurring at the point located at the predetermined position due to shifts and elastic forces of the elastic support members by using the outputs from the shift computation part, and outputting results of the computations; and an implementation computation part for outputting commands respectively to the driving units. |
| priorityDate | 2012-02-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 20.