http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2013101252-A1
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e85662883ee11f4790be9874238ffa65 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-211 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J4-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-3581 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01J4-00 |
filingDate | 2012-04-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8dd6756d95c4ffca1b2a3eefbb931b72 |
publicationDate | 2013-07-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | WO-2013101252-A1 |
titleOfInvention | Terahertz ellipsometer system, and method of use |
abstract | A terahertz ellipsometer, the basic preferred embodiment being a sequential system having a backward wave oscillator (BWO); a first rotatable polarizer that includes a wire grid (WGP1); a rotating polarizer that includes a wire grid (RWGP); a stage (STG) for supporting a sample (S); a rotating retarder (RRET) comprising first (RP), second (RM1), third (RM2) and fourth (RM3) elements; a second rotatable polarizer that includes a wire grid (WGP2); and a Golay cell detector (DET). |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10670520-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9651426-B2 |
priorityDate | 2011-12-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 34.