| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_99505f5f312672820e9f78c254c00a4d |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76251
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B25-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B25-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76259 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-762 |
| filingDate |
2012-12-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d3f8052e09a100c9d7c1021f2ab8ea01
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_11b47e51c4b14760d1173ba5c818b5cd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2b805f5479889a950a705266e0482703 |
| publicationDate |
2013-07-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2013098529-A1 |
| titleOfInvention |
Method for manufacturing a multilayer structure on a substrate |
| abstract |
The invention relates to a method for manufacturing a multilayer structure on a first substrate (30) made of a material having a first Young's modulus. The method includes: providing a second substrate (12) covered with the multilayer structure, the multilayer structure having a planar surface (28) opposite the second substrate, the second substrate being made of a material having a second Young's modulus that is different from the first Young's modulus; applying first deformations to said surface; molecularly bonding the first substrate to said surface, the molecular bonding resulting in the appearance of second deformations in said surface in the absence of the first deformations, the first deformations being opposite the second deformations; and removing the second substrate, the resulting deformations in said surface being less than 5 ppm. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20170094327-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11211338-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2016093284-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10483212-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2016093284-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102483237-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020074369-A |
| priorityDate |
2011-12-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |