| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3314680c89381570dd7dc2bafb74a388
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9fa0979d76b609b83394ea7b976c4f60
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c67f71c4440b5f9ee3e9fc9c5c062aa4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_778fe5aa551806ca134b210927ef0eb8 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F3-04 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02 |
| filingDate |
2012-07-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_77676e04f96231cadafcddaefeb6aab7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ac39feb39e420148328672cdd8a6671a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a5344b151b47d78d00e9c36fedfdb315 |
| publicationDate |
2013-06-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2013086775-A1 |
| titleOfInvention |
Chemical mechanical polishing slurry for metal and application thereof |
| abstract |
Disclosed are a chemical mechanical polishing slurry for copper and application thereof. The slurry comprises an abrasive particle, a complexing agent, an oxidant, a corrosion inhibitor and at least one of phosphate type surfactant. The use of the chemical mechanical polishing slurry can keep a high copper removal rate, and improve dishing dent and over polishing window of polished copper line. The slurry can improve the following detects such as few contaminants on the surface of the polished copper and no corrosion on it. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3562900-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106141901-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106811751-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106811751-A |
| priorityDate |
2011-12-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |