abstract |
Provided is a polysiloxazane hydroxide thin-film rinse solution comprising, with respect to the rinse solution as a whole, between 0.01 wt.% and 7 wt.% of an additive selected from the group consisting of alcohol-based solvents, ester-based solvents, silanol-based solvents, alkoxysilane-based solvents and alkyl silazane based solvents and combinations thereof. |