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publicationDate 2013-05-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-2013069921-A1
titleOfInvention Polysiloxazane hydroxide thin-film rinse solution, and polysiloxazane hydroxide thin-film pattern-forming method using same
abstract Provided is a polysiloxazane hydroxide thin-film rinse solution comprising, with respect to the rinse solution as a whole, between 0.01 wt.% and 7 wt.% of an additive selected from the group consisting of alcohol-based solvents, ester-based solvents, silanol-based solvents, alkoxysilane-based solvents and alkyl silazane based solvents and combinations thereof.
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