| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_db8acd71f5994544bda6df3f27a3f51e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3e1018b924ad1e238642eaad9d2172a7 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-2818
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S977-888
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-31749
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-3174 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B44C1-227
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q70-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y35-00 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-26 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q80-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q70-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82B3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82Y15-00 |
| filingDate |
2012-09-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0ac14cbb9c8b06b98fa9e38aa260d98d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_53caadb4bf6262a083a3bf76ca3c6592
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9b04e8634d534e10532bd1eedb32f6ba |
| publicationDate |
2013-04-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2013044352-A1 |
| titleOfInvention |
Method of fabricating nano-tips with controlled profile |
| abstract |
A nanotip, is fabricated by modifying a precursor nanotip having an apex and a shank by applying an electric field in the presence of a reactive gas to perform field-assisted etching wherein atoms are preferentially removed from the shank by chemical interaction with the reactive gas, and controlling the reactive gas pressure and/or tip voltage to vary the electric field so as to promote field evaporation of apex atoms during fabrication of the nanotip and thereby control the overall profile of the resulting nanotip. The method permits shaping of the overall tip profile. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2546862-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2546862-A1 |
| priorityDate |
2011-09-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |