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filingDate 2011-11-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dda42b9abf248ae81589578542e10882
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publicationDate 2013-03-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-2013033877-A1
titleOfInvention Semiconductor structure and manufacturing method thereof
abstract A semiconductor structure and a manufacturing method thereof. The semiconductor structure comprises: a semiconductor base; a first insulating material layer, a first conducting material layer, a second insulating material layer, a second conducting material layer, and an insulating buried layer that are sequentially formed on the semiconductor base; a semiconductor layer combined on the insulating buried layer; transistors formed on the semiconductor layer, a channel region of the transistor being formed in the semiconductor layer and having a back gate formed by the second conducting material layer; a dielectric layer covering the semiconductor layer and the transistors; an isolation structure for at least electrically isolating each transistor from adjacent transistors, the top of the isolation structure being flush with or slightly higher than the upper surface of the semiconductor layer, and the bottom of the isolation structure being located in the second insulating material layer; and a conducting contact running through the dielectric layer and extending downwards into the first conducting material layer.
priorityDate 2011-09-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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Total number of triples: 30.