| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fc28b30a60ee5fab9b1fc44b88dd1fa1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_924d7f7e8905e222067b2b7b265e82c3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_82516abf82fb5fba75171ea50365c1c7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5a09c5653462d01911562d95f5d7a2df
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_019cbf9e748800999e2d3f4eb871da42 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-49105
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2203-0136
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-016
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2203-0307 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01H59-0009
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01G5-16 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00 |
| filingDate |
2012-08-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8853f86ca17b2680dfa7619c69f9ad00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0da230992e9a8fe609f527974409fa76
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_acbd8b3ac4cad0a76d3067df9fe12de4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a20766516d5668477551fba55e86ea60 |
| publicationDate |
2013-03-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2013033526-A2 |
| titleOfInvention |
Mems device anchoring |
| abstract |
Embodiments of the present invention generally relate to a MEMS device that is anchored using the layer that is deposited to form the cavity sealing layer and/or with the layer that is deposited to form the pull-off electrode. The switching element of the MEMS device will have a flexible or movable portion and will also have a fixed or anchor portion that is electrically coupled to ground. The layer that is used to seal the cavity in which the switching element is disposed can also be coupled to the fixed or anchor portion of the switching element to anchor the fixed or anchor portion within the cavity. Additionally, the layer that is used to form one of the electrodes may be used to provide additional leverage for anchoring the fixed or anchor portion within the cavity. In either situation, the movement of the flexible or movable portion is not hindered. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017087340-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108352276-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11548779-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108352276-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10707039-B2 |
| priorityDate |
2011-09-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |