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publicationDate 2013-02-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-2013027041-A2
titleOfInvention A semiconductor laser device and a method for manufacturing a semiconductor laser device
abstract A semiconductor laser device 100 formed on a semiconductor substrate 102, the device comprising : a passivation layer 118 arranged on an upper surface of the device structure for resisting moisture ingress, wherein the passivation layer comprises an inner layer 118a deposited on the upper surface of the device by atomic layer deposition and an outer layer 118b deposited on the inner layer, and comprising a material that is inert in the presence of water.
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