| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_99ed7d555382529443531f12de2b61e0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_edbea5f3c12dfef6e66977c923e8a914
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7b94d2715cda37c1f23e48f9f4f23422
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fe0a7e7b24384dfb3984db91b8c985dd |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01P15-125
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01P15-097
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03K17-955
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01C19-5705
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03B5-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01P15-135 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03L7-00 |
| filingDate |
2012-06-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a87ee7dfee8925ae8093269e549bc464
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f3ef7c90139ace1e1dd35a5fd23f7fce |
| publicationDate |
2012-12-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2012178086-A1 |
| titleOfInvention |
Apparatus and methods for time domain measurement of oscillation perturbations |
| abstract |
An oscillatory apparatus and methods of utilizing the same. In one embodiment, the apparatus comprises a force sensor having a proof mass, with one or more sensing electron tunneling electrodes disposed thereon, and a frame comprising one or more reference electron tunneling electrodes. Conductive plates disposed on the sensor base and capping wafers induce oscillations of the proof mass. The sensing and the reference electrode pairs are disposed in a face-to-face configuration, thus forming a digital switch characterized by one or more closed states. In the closed state, the switch generates triggering events, thereby enabling the sensing apparatus to generate a digital output indicative of the mass position. The time period between consecutive trigger events is used to obtain mass deflection due to external forcing. Time separation between the triggering events is based on the physical dimensions established during fabrication, thus not requiring ongoing sensor calibration. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2014149085-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020124219-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105723184-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2976597-A4 |
| priorityDate |
2011-06-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |