| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f0f17f12d82ddffd72612eed32768b33
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_28bd6515b0fe9fb24d6857ea2cf27cb8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_de498babb0c04a00ceb653738877b147
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0cb193a1a7660ec362efdda75ac1543c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a0d3c45ccb88f8c66867f0d1aced9c23 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02E10-50 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-02167
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-62
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L83-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02164
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B33-126
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D183-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B21-087 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B33-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K5-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D183-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-62
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L83-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B21-082 |
| filingDate |
2012-04-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f1d39545e68f5cef2d68e1c855b5c9df
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1b709cb94430887d08c86cf26b24b552
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_35944e2ac5fb442b0d78e3f0b1eb34c6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_60e45517011158bab079d13389ee1bd3 |
| publicationDate |
2012-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2012172860-A1 |
| titleOfInvention |
Inorganic polysilazane, silica film-forming coating liquid containing same, and method for forming silica film |
| abstract |
The present invention provides: an inorganic polysilazane which does not contract much in a firing process in an oxidant such as water vapor and provides a silica film that is not easily cracked nor separated from a semiconductor substrate; and a silica film-forming coating liquid which contains the inorganic polysilazane. The present invention specifically provides: an inorganic polysilazane which has a value of A/(B + C) of 0.9-1.5 and a value of (A + B)/C of 4.2-50 when the peak area within the range from 4.75 ppm (inclusive) to 5.4 ppm (exclusive) is represented by A, the peak area within the range from 4.5 ppm (inclusive) to 4.75 ppm (exclusive) is represented by B, and the peak area within the range from 4.2 ppm (inclusive) to 4.5 ppm (exclusive) is represented by C in an 1 H-NMR spectrum, while having a mass average molecular weight of 2,000-20,000 in terms of polystyrene; and a silica film-forming coating liquid which contains the inorganic polysilazane. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101817927-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017250206-A1 |
| priorityDate |
2011-06-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |